Description

• Title:
  Evaluation of electrical resistivity, residual stress and surface roughness of sputtering indium tin oxide films with different thicknesses
• Creator:
  Tien, Chuen-Lin;
  Lin, Tsai-Wei;
  Su, Shu-Hui
• Contributor:
  Urbańczyk, Wacław. Redakcja
• Description:
  Optica Applicata, Vol. 51, 2021, nr 4, s. 499-512;
  Optica Applicata is an international journal, published in a non-periodical form in the years 1971-1973 and quarterly since 1973. From the beginning of the year 2008, Optica Applicata is an Open Access journal available online via the Internet, with free access to the full text of articles serving the best interests of the scientific community. The journal is abstracted and indexed in: Chemical Abstracts, Compendex, Current Contents, Inspec, Referativnyj Zhurnal, SCI Expanded, Scopus, Ulrich’s Periodicals Directory;
  http://opticaapplicata.pwr.edu.pl
• Object availability:
  free access
• Rights:
  Wszystkie prawa zastrzeżone (Copyright);
  Dla wszystkich w zakresie dozwolonego użytku
• Date:
  2021.12.31;
  2021
• Type:
  artykuł
• Language:
  English
• Source:
  <sygn. PWr A3481II>;
  http://aleph.bg.pwr.wroc.pl/F/?func=find-b&request=000122307+&find_code=SYS&adjacent=N&local_base=TUR&x=64&y=13&filter_code_1=WLN&filter_request_1=&filter_code_2=WYR&filter_request_2=&filter_code_3=WYR&filter_request_3=&filter_code_4=WFT&filter_request_4=&filter_code_5=WSB&filter_request_5= ;http://opticaapplicata.pwr.edu.pl
• Publisher:
  Oficyna Wydawnicza Politechniki Wrocławskiej
• Relation:
  Optica Applicata;
  Optica Applicata, Vol. 51, 2021;
  Optica Applicata, Vol. 51, 2021, nr 4;
  Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki
• Subject:
  optyka;
  indium tin oxide;
  magnetron sputtering;
  residual stress;
  surface roughness
• Identifier: DOI: 10.37190/oa210403
• Data provider:
  Dolnośląska Biblioteka Cyfrowa
• Can I use it?:
  seek permission
• Type:
  image